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New issues in application of diamond crystals in microelectronics and nanotechnologies

Authors
 Karasev V.Yu.
 Mozgin A.A.
Date of publication
 2006

Abstract
 The new technique of processing of diamond crystals, allowing to form high-quality surfaces for carrying out epitaxial growth processes is represented. The opportunity of use of various diamond surfaces in micro and nano-electronics is considered.
Keywords
 application of diamond crystals, microelectronics, nanotechnologies
Library reference
 Karasev V.Yu., Mozgin A.A. New issues in application of diamond crystals in microelectronics and nanotechnologies // Problems of Perspective Microelectronic Systems Development - 2006. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2006. P. 295-299.
URL of paper
 http://www.mes-conference.ru/data/year2006/53.pdf

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