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Development and designing of integrated thermoelements

 Amelichev V.V.
 Polomoshnov S.A.
 Chaplygin Yu.A.
Date of publication

 In work bases of designing of integrated thermoelements and thermomicrosystem on their basis are presented. The constructive-technological basis for creation thermomicrosystem with small power consumption (0,5-30 mWt) is shown. Feature of basis is the opportunity of integration of thermoelements with silicon microcircuits on one crystal.
 integrated thermoelements
Library reference
 Amelichev V.V., Polomoshnov S.A., Chaplygin Yu.A. Development and designing of integrated thermoelements // Problems of Perspective Microelectronic Systems Development - 2006. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2006. P. 416-420.
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