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The analysis of dynamic processes of interference distribution in substrates of integrated elements with methods of device-technological simulation

Authors
 Krupkina T.Yu.
 Rodionov D.V.
Date of publication
 2008

Abstract
 It is carried out research of the distributed effects in substrate by means of device-technological simulation TCAD. The equivalent circuits describing interaction of integrated transistor structures through a substrate are proposed.
Keywords
 interference distribution in substrates of integrated elements, device-technological simulation
Library reference
 Krupkina T.Yu., Rodionov D.V. The analysis of dynamic processes of interference distribution in substrates of integrated elements with methods of device-technological simulation // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2008. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2008. P. 179-182.
URL of paper
 http://www.mes-conference.ru/data/year2008/30.pdf

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