Home         Authors   Papers   Year of conference   Themes   Organizations        To MES conference

Problems of using device-technological simulation as tool of designing and ways of their solution

Authors
 Korolev M.A.
 Krupkina T.Yu.
 Chaplygin Yu.A.
Date of publication
 2005

Abstract
 Problems of using device-technological simulation as tool of designing and ways of their solution
Keywords
 device-technological simulation
Library reference
 Korolev M.A., Krupkina T.Yu., Chaplygin Yu.A. Problems of using device-technological simulation as tool of designing and ways of their solution // Problems of Perspective Microelectronic Systems Development - 2005. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2005. P. 143-150.
URL of paper
 http://www.mes-conference.ru/data/year2005/21.doc

Copyright © 2009-2018 IPPM RAS. All Rights Reserved.

Design of site: IPPM RAS