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Computer simulation of MEMS components

Authors
 Kolovsky Yu.V.
 Levitsky A.A.
 Marinushkin P.S.
Date of publication
 2008

Abstract
 Existing approaches to computer simulation of components of micro-electromechanical systems (MEMS) and corresponding kinds of analysis software are considered. Examples of numerical models of microdevices by means of packages ANSYS and Comsol Multiphysics are resulted. Application of offered models allows to spend interdisciplinary analysis of MEMS components in view of the factors essentially influencing on work of microdevices.
Keywords
 Computer simulation, MEMS
Library reference
 Kolovsky Yu.V., Levitsky A.A., Marinushkin P.S. Computer simulation of MEMS components // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2008. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2008. P. 398-401.
URL of paper
 http://www.mes-conference.ru/data/year2008/74.pdf

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