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Preliminary Processing of Experimental Data in Statistical Integrated Circuit Design

Authors
 Malyshev V.S.
 Pavlov P.G.
 Stempitski V.R.
Date of publication
 2010

Abstract
 Results of investigation, dedicated to selection and practical use of mathematical methods of preliminary processing and statistical analysis of experimental data, obtained in research and development manufacturing of integrated circuits
was presented.
Keywords
 integrated circuit, submicron technology, субмикронная технология, statistical analysis, statistical distribution, trend, smoothing methods.
Library reference
 Malyshev V.S., Pavlov P.G., Stempitski V.R. Preliminary Processing of Experimental Data in Statistical Integrated Circuit Design // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2010. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2010. P. 60-65.
URL of paper
 http://www.mes-conference.ru/data/year2010/papers/m10-183-20792.pdf

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