Home         Authors   Papers   Year of conference   Themes   Organizations        To MES conference

IR photosensitive MEMS elements

 Fetisov E.A.
 Khafizov R.Z.
 Belin A.M.
 Rudakov G.A.
 Zolotarev V.I.
 Fedirko V.A.
 Rygalin D.B.
Date of publication

 Design features of photosensitive cells for MEMS IR room temperature smart sensors are considered.
 MEMS, IR photosensitive MEMS elements, bimorph microcantilever, smart sensor
Library reference
 Fetisov E.A., Khafizov R.Z., Belin A.M., Rudakov G.A., Zolotarev V.I., Fedirko V.A., Rygalin D.B. IR photosensitive MEMS elements // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2012. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2012. P. 658-661.
URL of paper

Copyright © 2009-2018 IPPM RAS. All Rights Reserved.

Design of site: IPPM RAS