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IR photosensitive MEMS elements

Authors
 Fetisov E.A.
 Khafizov R.Z.
 Belin A.M.
 Rudakov G.A.
 Zolotarev V.I.
 Fedirko V.A.
 Rygalin D.B.
Date of publication
 2012

Abstract
 Design features of photosensitive cells for MEMS IR room temperature smart sensors are considered.
Keywords
 MEMS, IR photosensitive MEMS elements, bimorph microcantilever, smart sensor
Library reference
 Fetisov E.A., Khafizov R.Z., Belin A.M., Rudakov G.A., Zolotarev V.I., Fedirko V.A., Rygalin D.B. IR photosensitive MEMS elements // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2012. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2012. P. 658-661.
URL of paper
 http://www.mes-conference.ru/data/year2012/pdf/D90.pdf

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