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IR photosensitive MEMS elements

 Fetisov E.A.
 Khafizov R.Z.
 Belin A.M.
 Rudakov G.A.
 Zolotarev V.I.
 Fedirko V.A.
 Rygalin D.B.
Date of publication

 Design features of photosensitive cells for MEMS IR room temperature smart sensors are considered.
 MEMS, IR photosensitive MEMS elements, bimorph microcantilever, smart sensor
Library reference
 Fetisov E.A., Khafizov R.Z., Belin A.M., Rudakov G.A., Zolotarev V.I., Fedirko V.A., Rygalin D.B. IR photosensitive MEMS elements // Problems of Perspective Micro- and Nanoelectronic Systems Development - 2012. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2012. P. 658-661.
URL of paper

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