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Experience of development of CCD matrix photoreceivers with interlower case carry

Authors
 Kostukov E.V.
 Mihajlichenko O.V.
 Morozov V.F.
 Skrylev A.S.
 Morozov V.F.
 Trunov S.V.
Date of publication
 2005

Abstract
 It is developed constructive-technological approaches to designing modern photo CCD matrix, and design procedures and optimization of topology and technological modes of manufacturing of their structures which have provided not only successful development of such devices, but also creation of rules of designing of devices of following generation with design norms of the order 0,8mkm.
Keywords
 CCD matrix
Library reference
 Kostukov E.V., Mihajlichenko O.V., Morozov V.F., Skrylev A.S., Morozov V.F., Trunov S.V. Experience of development of CCD matrix photoreceivers with interlower case carry // Problems of Perspective Microelectronic Systems Development - 2005. Proceedings / edited by A. Stempkovsky, Moscow, IPPM RAS, 2005. P. 320-327.
URL of paper
 http://www.mes-conference.ru/data/year2005/48.doc

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